Superconducting nanowires can be fabricated by decomposition of anorganometallic gas using a focused beam of Ga ions. However, physical damageand unintentional doping often results from the exposure to the ion beam,motivating the search for a means to achieve similar structures with a beam ofelectrons instead of ions. This has so far remained an experimental challenge.We report the fabrication of superconducting tungsten nanowires byelectron-beam-induced-deposition, with critical temperature of 2.0 K andcritical magnetic field of 3.7 T, and compare them with superconducting wiresmade with ions. This work opens up new possibilities for the realization ofnanoscale superconducting devices, without the requirement of an ion beamcolumn.
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